Silicon Nitride Overlays Deposited on Optical Fibers with RF PECVD Method for Sensing Applications: Overlay Uniformity Aspects
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چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Acta Physica Polonica A
سال: 2015
ISSN: 0587-4246,1898-794X
DOI: 10.12693/aphyspola.127.1587